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This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.
Price: $96.99
Pages: 113
Publisher: De Gruyter
Imprint: De Gruyter
Series: De Gruyter Textbook
Publication Date:
22 November 2021
ISBN: 9783110712513
Format: Paperback
BISACs:
TECHNOLOGY & ENGINEERING / Materials Science / General, SCI000000 SCIENCE / General, SCI013030 SCIENCE / Chemistry / Inorganic, SCI013060 SCIENCE / Chemistry / Industrial & Technical, TEC008070 Technology & Engineering / Electronics / Microelectronics, TEC009010 Technology & Engineering / Chemical & Biochemical, TEC021030 Technology & Engineering / Materials Science / Metals & Alloys
Seán Thomas Barry, Carleton University, Ottawa, Canada.